10/27/2010	9:35:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2010	9:35:05 AM	Recipe started at 9:35 AM
10/27/2010	9:35:05 AM	H2 valve closed
10/27/2010	9:35:05 AM	BCl3 valve closed
10/27/2010	9:35:05 AM	PH3 valve closed
10/27/2010	9:35:05 AM	SiCl4 pre valve closed
10/27/2010	9:35:05 AM	SiCl4 post valve closed
10/27/2010	9:35:05 AM	Main Vac valve closed
10/27/2010	9:35:05 AM	Bypass valve closed
10/27/2010	9:35:05 AM	Bubbler valve closed
10/27/2010	9:35:05 AM	Helium valve opened
10/27/2010	9:35:05 AM	Helium MFC set to  500.000000
10/27/2010	9:35:05 AM	H2 MFC set to  0.000000
10/27/2010	9:35:05 AM	BCl3 MFC set to  0.000000
10/27/2010	9:35:05 AM	PHl3 MFC set to  0.000000
10/27/2010	9:35:05 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:35:05 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:35:05 AM	Tube furnace set to 0
10/27/2010	9:36:20 AM	Helium valve closed
10/27/2010	9:36:20 AM	H2 valve closed
10/27/2010	9:36:20 AM	BCl3 valve closed
10/27/2010	9:36:20 AM	PH3 valve closed
10/27/2010	9:36:20 AM	SiCl4 pre valve closed
10/27/2010	9:36:20 AM	SiCl4 post valve closed
10/27/2010	9:36:20 AM	Main Vac valve closed
10/27/2010	9:36:20 AM	Bypass valve closed
10/27/2010	9:36:20 AM	Bubbler valve closed
10/27/2010	9:36:20 AM	Helium MFC set to  0.000000
10/27/2010	9:36:20 AM	H2 MFC set to  0.000000
10/27/2010	9:36:20 AM	BCl3 MFC set to  0.000000
10/27/2010	9:36:20 AM	PHl3 MFC set to  0.000000
10/27/2010	9:36:20 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:36:20 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:36:20 AM	Tube furnace set to 0
10/27/2010	9:36:20 AM	Run finished at 9:36 AM
10/27/2010	9:36:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2010	9:37:26 AM	Program exited cleanly
10/27/2010	9:42:03 AM	Program started normally
10/27/2010	9:42:05 AM	Helium valve closed
10/27/2010	9:42:05 AM	H2 valve closed
10/27/2010	9:42:05 AM	BCl3 valve closed
10/27/2010	9:42:05 AM	PH3 valve closed
10/27/2010	9:42:05 AM	SiCl4 pre valve closed
10/27/2010	9:42:05 AM	SiCl4 post valve closed
10/27/2010	9:42:05 AM	Main Vac valve closed
10/27/2010	9:42:05 AM	Bypass valve closed
10/27/2010	9:42:05 AM	Bubbler valve closed
10/27/2010	9:42:05 AM	Helium MFC set to  0.000000
10/27/2010	9:42:05 AM	H2 MFC set to  0.000000
10/27/2010	9:42:05 AM	BCl3 MFC set to  0.000000
10/27/2010	9:42:05 AM	PHl3 MFC set to  0.000000
10/27/2010	9:42:05 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:42:05 AM	Bypass solenoid MFC set to  760.000000
10/27/2010	9:42:05 AM	Tube furnace set to 0
10/27/2010	9:42:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	9:42:06 AM	Recipe started at 9:42 AM
10/27/2010	9:42:06 AM	Helium valve closed
10/27/2010	9:42:06 AM	H2 valve closed
10/27/2010	9:42:06 AM	BCl3 valve closed
10/27/2010	9:42:06 AM	PH3 valve closed
10/27/2010	9:42:06 AM	SiCl4 pre valve closed
10/27/2010	9:42:06 AM	SiCl4 post valve closed
10/27/2010	9:42:06 AM	Main Vac valve closed
10/27/2010	9:42:06 AM	Bubbler valve closed
10/27/2010	9:42:06 AM	Bypass valve opened
10/27/2010	9:42:06 AM	Helium MFC set to  0.000000
10/27/2010	9:42:06 AM	H2 MFC set to  0.000000
10/27/2010	9:42:06 AM	BCl3 MFC set to  0.000000
10/27/2010	9:42:06 AM	PHl3 MFC set to  0.000000
10/27/2010	9:42:06 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:42:06 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:42:06 AM	Tube furnace set to 0
10/27/2010	9:42:59 AM	Helium valve closed
10/27/2010	9:42:59 AM	H2 valve closed
10/27/2010	9:42:59 AM	BCl3 valve closed
10/27/2010	9:42:59 AM	PH3 valve closed
10/27/2010	9:42:59 AM	SiCl4 pre valve closed
10/27/2010	9:42:59 AM	SiCl4 post valve closed
10/27/2010	9:42:59 AM	Bubbler valve closed
10/27/2010	9:42:59 AM	Main Vac valve opened
10/27/2010	9:42:59 AM	Bypass valve opened
10/27/2010	9:42:59 AM	Helium MFC set to  0.000000
10/27/2010	9:42:59 AM	H2 MFC set to  0.000000
10/27/2010	9:42:59 AM	BCl3 MFC set to  0.000000
10/27/2010	9:42:59 AM	PHl3 MFC set to  0.000000
10/27/2010	9:42:59 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:42:59 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:42:59 AM	Tube furnace set to 0
10/27/2010	9:42:59 AM	Run finished at 9:42 AM
10/27/2010	9:42:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	9:49:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/27/2010	9:49:33 AM	Recipe started at 9:49 AM
10/27/2010	9:49:33 AM	Helium valve closed
10/27/2010	9:49:33 AM	H2 valve closed
10/27/2010	9:49:33 AM	BCl3 valve closed
10/27/2010	9:49:33 AM	PH3 valve closed
10/27/2010	9:49:33 AM	SiCl4 pre valve closed
10/27/2010	9:49:33 AM	SiCl4 post valve closed
10/27/2010	9:49:33 AM	Main Vac valve closed
10/27/2010	9:49:33 AM	Bubbler valve closed
10/27/2010	9:49:33 AM	Bypass valve opened
10/27/2010	9:49:33 AM	Helium MFC set to  0.000000
10/27/2010	9:49:33 AM	H2 MFC set to  0.000000
10/27/2010	9:49:33 AM	BCl3 MFC set to  0.000000
10/27/2010	9:49:33 AM	PHl3 MFC set to  0.000000
10/27/2010	9:49:33 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:49:33 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:49:33 AM	Tube furnace set to 0
10/27/2010	9:49:33 AM	Helium valve closed
10/27/2010	9:49:33 AM	H2 valve closed
10/27/2010	9:49:33 AM	BCl3 valve closed
10/27/2010	9:49:33 AM	PH3 valve closed
10/27/2010	9:49:33 AM	SiCl4 pre valve closed
10/27/2010	9:49:33 AM	SiCl4 post valve closed
10/27/2010	9:49:33 AM	Bubbler valve closed
10/27/2010	9:49:33 AM	Main Vac valve opened
10/27/2010	9:49:33 AM	Bypass valve opened
10/27/2010	9:49:33 AM	Helium MFC set to  0.000000
10/27/2010	9:49:33 AM	H2 MFC set to  0.000000
10/27/2010	9:49:33 AM	BCl3 MFC set to  0.000000
10/27/2010	9:49:33 AM	PHl3 MFC set to  0.000000
10/27/2010	9:49:33 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:49:33 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:49:33 AM	Tube furnace set to 0
10/27/2010	9:50:33 AM	H2 valve closed
10/27/2010	9:50:33 AM	BCl3 valve closed
10/27/2010	9:50:33 AM	PH3 valve closed
10/27/2010	9:50:33 AM	SiCl4 pre valve closed
10/27/2010	9:50:33 AM	SiCl4 post valve closed
10/27/2010	9:50:33 AM	Bubbler valve closed
10/27/2010	9:50:33 AM	Helium valve opened
10/27/2010	9:50:33 AM	Main Vac valve opened
10/27/2010	9:50:33 AM	Bypass valve opened
10/27/2010	9:50:33 AM	Helium MFC set to  100.000000
10/27/2010	9:50:33 AM	H2 MFC set to  0.000000
10/27/2010	9:50:33 AM	BCl3 MFC set to  0.000000
10/27/2010	9:50:33 AM	PHl3 MFC set to  0.000000
10/27/2010	9:50:33 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:50:33 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:50:34 AM	Tube furnace set to 0
10/27/2010	9:51:34 AM	Helium valve closed
10/27/2010	9:51:34 AM	H2 valve closed
10/27/2010	9:51:34 AM	BCl3 valve closed
10/27/2010	9:51:34 AM	PH3 valve closed
10/27/2010	9:51:34 AM	SiCl4 pre valve closed
10/27/2010	9:51:34 AM	SiCl4 post valve closed
10/27/2010	9:51:34 AM	Bubbler valve closed
10/27/2010	9:51:34 AM	Main Vac valve opened
10/27/2010	9:51:34 AM	Bypass valve opened
10/27/2010	9:51:34 AM	Helium MFC set to  0.000000
10/27/2010	9:51:34 AM	H2 MFC set to  0.000000
10/27/2010	9:51:34 AM	BCl3 MFC set to  0.000000
10/27/2010	9:51:34 AM	PHl3 MFC set to  0.000000
10/27/2010	9:51:34 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:51:34 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:51:34 AM	Tube furnace set to 0
10/27/2010	9:52:34 AM	H2 valve closed
10/27/2010	9:52:34 AM	BCl3 valve closed
10/27/2010	9:52:34 AM	PH3 valve closed
10/27/2010	9:52:34 AM	SiCl4 pre valve closed
10/27/2010	9:52:34 AM	SiCl4 post valve closed
10/27/2010	9:52:34 AM	Bubbler valve closed
10/27/2010	9:52:34 AM	Helium valve opened
10/27/2010	9:52:34 AM	Main Vac valve opened
10/27/2010	9:52:34 AM	Bypass valve opened
10/27/2010	9:52:34 AM	Helium MFC set to  100.000000
10/27/2010	9:52:34 AM	H2 MFC set to  0.000000
10/27/2010	9:52:34 AM	BCl3 MFC set to  0.000000
10/27/2010	9:52:34 AM	PHl3 MFC set to  0.000000
10/27/2010	9:52:34 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:52:34 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:52:34 AM	Tube furnace set to 0
10/27/2010	9:53:34 AM	Helium valve closed
10/27/2010	9:53:34 AM	H2 valve closed
10/27/2010	9:53:34 AM	BCl3 valve closed
10/27/2010	9:53:34 AM	PH3 valve closed
10/27/2010	9:53:34 AM	SiCl4 pre valve closed
10/27/2010	9:53:34 AM	SiCl4 post valve closed
10/27/2010	9:53:34 AM	Bubbler valve closed
10/27/2010	9:53:34 AM	Main Vac valve opened
10/27/2010	9:53:34 AM	Bypass valve opened
10/27/2010	9:53:34 AM	Helium MFC set to  0.000000
10/27/2010	9:53:34 AM	H2 MFC set to  0.000000
10/27/2010	9:53:34 AM	BCl3 MFC set to  0.000000
10/27/2010	9:53:34 AM	PHl3 MFC set to  0.000000
10/27/2010	9:53:34 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:53:34 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:53:34 AM	Tube furnace set to 0
10/27/2010	9:54:34 AM	H2 valve closed
10/27/2010	9:54:34 AM	BCl3 valve closed
10/27/2010	9:54:34 AM	PH3 valve closed
10/27/2010	9:54:34 AM	SiCl4 pre valve closed
10/27/2010	9:54:34 AM	SiCl4 post valve closed
10/27/2010	9:54:34 AM	Bubbler valve closed
10/27/2010	9:54:34 AM	Helium valve opened
10/27/2010	9:54:34 AM	Main Vac valve opened
10/27/2010	9:54:34 AM	Bypass valve opened
10/27/2010	9:54:34 AM	Helium MFC set to  100.000000
10/27/2010	9:54:34 AM	H2 MFC set to  0.000000
10/27/2010	9:54:34 AM	BCl3 MFC set to  0.000000
10/27/2010	9:54:34 AM	PHl3 MFC set to  0.000000
10/27/2010	9:54:34 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:54:34 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:54:34 AM	Tube furnace set to 0
10/27/2010	9:55:34 AM	Helium valve closed
10/27/2010	9:55:34 AM	H2 valve closed
10/27/2010	9:55:34 AM	BCl3 valve closed
10/27/2010	9:55:34 AM	PH3 valve closed
10/27/2010	9:55:34 AM	SiCl4 pre valve closed
10/27/2010	9:55:34 AM	SiCl4 post valve closed
10/27/2010	9:55:34 AM	Bubbler valve closed
10/27/2010	9:55:34 AM	Main Vac valve opened
10/27/2010	9:55:34 AM	Bypass valve opened
10/27/2010	9:55:34 AM	Helium MFC set to  0.000000
10/27/2010	9:55:34 AM	H2 MFC set to  0.000000
10/27/2010	9:55:34 AM	BCl3 MFC set to  0.000000
10/27/2010	9:55:34 AM	PHl3 MFC set to  0.000000
10/27/2010	9:55:34 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:55:34 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:55:35 AM	Tube furnace set to 0
10/27/2010	9:56:35 AM	H2 valve closed
10/27/2010	9:56:35 AM	BCl3 valve closed
10/27/2010	9:56:35 AM	PH3 valve closed
10/27/2010	9:56:35 AM	SiCl4 pre valve closed
10/27/2010	9:56:35 AM	SiCl4 post valve closed
10/27/2010	9:56:35 AM	Bubbler valve closed
10/27/2010	9:56:35 AM	Helium valve opened
10/27/2010	9:56:35 AM	Main Vac valve opened
10/27/2010	9:56:35 AM	Bypass valve opened
10/27/2010	9:56:35 AM	Helium MFC set to  100.000000
10/27/2010	9:56:35 AM	H2 MFC set to  0.000000
10/27/2010	9:56:35 AM	BCl3 MFC set to  0.000000
10/27/2010	9:56:35 AM	PHl3 MFC set to  0.000000
10/27/2010	9:56:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:56:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:56:35 AM	Tube furnace set to 0
10/27/2010	9:57:35 AM	Helium valve closed
10/27/2010	9:57:35 AM	H2 valve closed
10/27/2010	9:57:35 AM	BCl3 valve closed
10/27/2010	9:57:35 AM	PH3 valve closed
10/27/2010	9:57:35 AM	SiCl4 pre valve closed
10/27/2010	9:57:35 AM	SiCl4 post valve closed
10/27/2010	9:57:35 AM	Bubbler valve closed
10/27/2010	9:57:35 AM	Main Vac valve opened
10/27/2010	9:57:35 AM	Bypass valve opened
10/27/2010	9:57:35 AM	Helium MFC set to  0.000000
10/27/2010	9:57:35 AM	H2 MFC set to  0.000000
10/27/2010	9:57:35 AM	BCl3 MFC set to  0.000000
10/27/2010	9:57:35 AM	PHl3 MFC set to  0.000000
10/27/2010	9:57:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:57:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:57:35 AM	Tube furnace set to 0
10/27/2010	9:58:35 AM	H2 valve closed
10/27/2010	9:58:35 AM	BCl3 valve closed
10/27/2010	9:58:35 AM	PH3 valve closed
10/27/2010	9:58:35 AM	SiCl4 pre valve closed
10/27/2010	9:58:35 AM	SiCl4 post valve closed
10/27/2010	9:58:35 AM	Bubbler valve closed
10/27/2010	9:58:35 AM	Helium valve opened
10/27/2010	9:58:35 AM	Main Vac valve opened
10/27/2010	9:58:35 AM	Bypass valve opened
10/27/2010	9:58:35 AM	Helium MFC set to  100.000000
10/27/2010	9:58:35 AM	H2 MFC set to  0.000000
10/27/2010	9:58:35 AM	BCl3 MFC set to  0.000000
10/27/2010	9:58:35 AM	PHl3 MFC set to  0.000000
10/27/2010	9:58:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:58:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:58:35 AM	Tube furnace set to 0
10/27/2010	9:59:35 AM	Helium valve closed
10/27/2010	9:59:35 AM	H2 valve closed
10/27/2010	9:59:35 AM	BCl3 valve closed
10/27/2010	9:59:35 AM	PH3 valve closed
10/27/2010	9:59:35 AM	SiCl4 pre valve closed
10/27/2010	9:59:35 AM	SiCl4 post valve closed
10/27/2010	9:59:35 AM	Bubbler valve closed
10/27/2010	9:59:35 AM	Main Vac valve opened
10/27/2010	9:59:35 AM	Bypass valve opened
10/27/2010	9:59:35 AM	Helium MFC set to  0.000000
10/27/2010	9:59:35 AM	H2 MFC set to  0.000000
10/27/2010	9:59:35 AM	BCl3 MFC set to  0.000000
10/27/2010	9:59:35 AM	PHl3 MFC set to  0.000000
10/27/2010	9:59:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	9:59:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:59:35 AM	Tube furnace set to 0
10/27/2010	10:00:35 AM	H2 valve closed
10/27/2010	10:00:35 AM	BCl3 valve closed
10/27/2010	10:00:35 AM	PH3 valve closed
10/27/2010	10:00:35 AM	SiCl4 pre valve closed
10/27/2010	10:00:35 AM	SiCl4 post valve closed
10/27/2010	10:00:35 AM	Bubbler valve closed
10/27/2010	10:00:35 AM	Helium valve opened
10/27/2010	10:00:35 AM	Main Vac valve opened
10/27/2010	10:00:35 AM	Bypass valve opened
10/27/2010	10:00:35 AM	Helium MFC set to  100.000000
10/27/2010	10:00:35 AM	H2 MFC set to  0.000000
10/27/2010	10:00:35 AM	BCl3 MFC set to  0.000000
10/27/2010	10:00:35 AM	PHl3 MFC set to  0.000000
10/27/2010	10:00:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:00:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:00:36 AM	Tube furnace set to 0
10/27/2010	10:01:36 AM	Helium valve closed
10/27/2010	10:01:36 AM	H2 valve closed
10/27/2010	10:01:36 AM	BCl3 valve closed
10/27/2010	10:01:36 AM	PH3 valve closed
10/27/2010	10:01:36 AM	SiCl4 pre valve closed
10/27/2010	10:01:36 AM	SiCl4 post valve closed
10/27/2010	10:01:36 AM	Bubbler valve closed
10/27/2010	10:01:36 AM	Main Vac valve opened
10/27/2010	10:01:36 AM	Bypass valve opened
10/27/2010	10:01:36 AM	Helium MFC set to  0.000000
10/27/2010	10:01:36 AM	H2 MFC set to  0.000000
10/27/2010	10:01:36 AM	BCl3 MFC set to  0.000000
10/27/2010	10:01:36 AM	PHl3 MFC set to  0.000000
10/27/2010	10:01:36 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:01:36 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:01:36 AM	Tube furnace set to 0
10/27/2010	10:02:36 AM	H2 valve closed
10/27/2010	10:02:36 AM	BCl3 valve closed
10/27/2010	10:02:36 AM	PH3 valve closed
10/27/2010	10:02:36 AM	SiCl4 pre valve closed
10/27/2010	10:02:36 AM	SiCl4 post valve closed
10/27/2010	10:02:36 AM	Bubbler valve closed
10/27/2010	10:02:36 AM	Helium valve opened
10/27/2010	10:02:36 AM	Main Vac valve opened
10/27/2010	10:02:36 AM	Bypass valve opened
10/27/2010	10:02:36 AM	Helium MFC set to  100.000000
10/27/2010	10:02:36 AM	H2 MFC set to  0.000000
10/27/2010	10:02:36 AM	BCl3 MFC set to  0.000000
10/27/2010	10:02:36 AM	PHl3 MFC set to  0.000000
10/27/2010	10:02:36 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:02:36 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:02:36 AM	Tube furnace set to 0
10/27/2010	10:03:36 AM	Helium valve closed
10/27/2010	10:03:36 AM	H2 valve closed
10/27/2010	10:03:36 AM	BCl3 valve closed
10/27/2010	10:03:36 AM	PH3 valve closed
10/27/2010	10:03:36 AM	SiCl4 pre valve closed
10/27/2010	10:03:36 AM	SiCl4 post valve closed
10/27/2010	10:03:36 AM	Bubbler valve closed
10/27/2010	10:03:36 AM	Main Vac valve opened
10/27/2010	10:03:36 AM	Bypass valve opened
10/27/2010	10:03:36 AM	Helium MFC set to  0.000000
10/27/2010	10:03:36 AM	H2 MFC set to  0.000000
10/27/2010	10:03:36 AM	BCl3 MFC set to  0.000000
10/27/2010	10:03:36 AM	PHl3 MFC set to  0.000000
10/27/2010	10:03:36 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:03:36 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:03:36 AM	Tube furnace set to 0
10/27/2010	10:04:36 AM	H2 valve closed
10/27/2010	10:04:36 AM	BCl3 valve closed
10/27/2010	10:04:36 AM	PH3 valve closed
10/27/2010	10:04:36 AM	SiCl4 pre valve closed
10/27/2010	10:04:36 AM	SiCl4 post valve closed
10/27/2010	10:04:36 AM	Bubbler valve closed
10/27/2010	10:04:36 AM	Helium valve opened
10/27/2010	10:04:36 AM	Main Vac valve opened
10/27/2010	10:04:36 AM	Bypass valve opened
10/27/2010	10:04:36 AM	Helium MFC set to  100.000000
10/27/2010	10:04:36 AM	H2 MFC set to  0.000000
10/27/2010	10:04:36 AM	BCl3 MFC set to  0.000000
10/27/2010	10:04:36 AM	PHl3 MFC set to  0.000000
10/27/2010	10:04:36 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:04:36 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:04:36 AM	Tube furnace set to 0
10/27/2010	10:05:36 AM	Helium valve closed
10/27/2010	10:05:36 AM	H2 valve closed
10/27/2010	10:05:36 AM	BCl3 valve closed
10/27/2010	10:05:36 AM	PH3 valve closed
10/27/2010	10:05:36 AM	SiCl4 pre valve closed
10/27/2010	10:05:36 AM	SiCl4 post valve closed
10/27/2010	10:05:36 AM	Bubbler valve closed
10/27/2010	10:05:36 AM	Main Vac valve opened
10/27/2010	10:05:36 AM	Bypass valve opened
10/27/2010	10:05:36 AM	Helium MFC set to  0.000000
10/27/2010	10:05:36 AM	H2 MFC set to  0.000000
10/27/2010	10:05:36 AM	BCl3 MFC set to  0.000000
10/27/2010	10:05:36 AM	PHl3 MFC set to  0.000000
10/27/2010	10:05:36 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:05:36 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:05:37 AM	Tube furnace set to 0
10/27/2010	10:06:37 AM	H2 valve closed
10/27/2010	10:06:37 AM	BCl3 valve closed
10/27/2010	10:06:37 AM	PH3 valve closed
10/27/2010	10:06:37 AM	SiCl4 pre valve closed
10/27/2010	10:06:37 AM	SiCl4 post valve closed
10/27/2010	10:06:37 AM	Bubbler valve closed
10/27/2010	10:06:37 AM	Helium valve opened
10/27/2010	10:06:37 AM	Main Vac valve opened
10/27/2010	10:06:37 AM	Bypass valve opened
10/27/2010	10:06:37 AM	Helium MFC set to  100.000000
10/27/2010	10:06:37 AM	H2 MFC set to  0.000000
10/27/2010	10:06:37 AM	BCl3 MFC set to  0.000000
10/27/2010	10:06:37 AM	PHl3 MFC set to  0.000000
10/27/2010	10:06:37 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:06:37 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:06:37 AM	Tube furnace set to 0
10/27/2010	10:07:37 AM	Helium valve closed
10/27/2010	10:07:37 AM	H2 valve closed
10/27/2010	10:07:37 AM	BCl3 valve closed
10/27/2010	10:07:37 AM	PH3 valve closed
10/27/2010	10:07:37 AM	SiCl4 pre valve closed
10/27/2010	10:07:37 AM	SiCl4 post valve closed
10/27/2010	10:07:37 AM	Bubbler valve closed
10/27/2010	10:07:37 AM	Main Vac valve opened
10/27/2010	10:07:37 AM	Bypass valve opened
10/27/2010	10:07:37 AM	Helium MFC set to  0.000000
10/27/2010	10:07:37 AM	H2 MFC set to  0.000000
10/27/2010	10:07:37 AM	BCl3 MFC set to  0.000000
10/27/2010	10:07:37 AM	PHl3 MFC set to  0.000000
10/27/2010	10:07:37 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:07:37 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:07:37 AM	Tube furnace set to 0
10/27/2010	10:08:37 AM	H2 valve closed
10/27/2010	10:08:37 AM	BCl3 valve closed
10/27/2010	10:08:37 AM	PH3 valve closed
10/27/2010	10:08:37 AM	SiCl4 pre valve closed
10/27/2010	10:08:37 AM	SiCl4 post valve closed
10/27/2010	10:08:37 AM	Bubbler valve closed
10/27/2010	10:08:37 AM	Helium valve opened
10/27/2010	10:08:37 AM	Main Vac valve opened
10/27/2010	10:08:37 AM	Bypass valve opened
10/27/2010	10:08:37 AM	Helium MFC set to  100.000000
10/27/2010	10:08:37 AM	H2 MFC set to  0.000000
10/27/2010	10:08:37 AM	BCl3 MFC set to  0.000000
10/27/2010	10:08:37 AM	PHl3 MFC set to  0.000000
10/27/2010	10:08:37 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:08:37 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:08:37 AM	Tube furnace set to 0
10/27/2010	10:09:37 AM	Helium valve closed
10/27/2010	10:09:37 AM	H2 valve closed
10/27/2010	10:09:37 AM	BCl3 valve closed
10/27/2010	10:09:37 AM	PH3 valve closed
10/27/2010	10:09:37 AM	SiCl4 pre valve closed
10/27/2010	10:09:37 AM	SiCl4 post valve closed
10/27/2010	10:09:37 AM	Bubbler valve closed
10/27/2010	10:09:37 AM	Main Vac valve opened
10/27/2010	10:09:37 AM	Bypass valve opened
10/27/2010	10:09:37 AM	Helium MFC set to  0.000000
10/27/2010	10:09:37 AM	H2 MFC set to  0.000000
10/27/2010	10:09:37 AM	BCl3 MFC set to  0.000000
10/27/2010	10:09:37 AM	PHl3 MFC set to  0.000000
10/27/2010	10:09:37 AM	SiCl4 MFC set to  0.000000
10/27/2010	10:09:37 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:09:37 AM	Tube furnace set to 0
10/27/2010	10:09:38 AM	Run finished at 10:09 AM
10/27/2010	10:09:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/27/2010	11:47:00 AM	Tube furnace set to 100
10/27/2010	11:48:43 AM	Recipe started at 11:48 AM
10/27/2010	11:48:43 AM	Helium valve closed
10/27/2010	11:48:43 AM	BCl3 valve closed
10/27/2010	11:48:43 AM	PH3 valve closed
10/27/2010	11:48:43 AM	SiCl4 pre valve closed
10/27/2010	11:48:43 AM	SiCl4 post valve closed
10/27/2010	11:48:43 AM	Main Vac valve closed
10/27/2010	11:48:43 AM	Bypass valve closed
10/27/2010	11:48:43 AM	Bubbler valve closed
10/27/2010	11:48:43 AM	H2 valve opened
10/27/2010	11:48:43 AM	Helium MFC set to  0.000000
10/27/2010	11:48:43 AM	H2 MFC set to  500.000000
10/27/2010	11:48:43 AM	BCl3 MFC set to  0.000000
10/27/2010	11:48:43 AM	PHl3 MFC set to  0.000000
10/27/2010	11:48:43 AM	SiCl4 MFC set to  0.000000
10/27/2010	11:48:43 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	11:48:43 AM	Tube furnace set to 100
10/27/2010	11:50:05 AM	Helium valve closed
10/27/2010	11:50:05 AM	BCl3 valve closed
10/27/2010	11:50:05 AM	PH3 valve closed
10/27/2010	11:50:05 AM	SiCl4 pre valve closed
10/27/2010	11:50:05 AM	SiCl4 post valve closed
10/27/2010	11:50:05 AM	Main Vac valve closed
10/27/2010	11:50:05 AM	Bypass valve closed
10/27/2010	11:50:05 AM	H2 valve opened
10/27/2010	11:50:05 AM	Bubbler valve opened
10/27/2010	11:50:05 AM	Helium MFC set to  0.000000
10/27/2010	11:50:05 AM	H2 MFC set to  500.000000
10/27/2010	11:50:05 AM	BCl3 MFC set to  0.000000
10/27/2010	11:50:05 AM	PHl3 MFC set to  0.000000
10/27/2010	11:50:05 AM	SiCl4 MFC set to  0.000000
10/27/2010	11:50:05 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	11:50:05 AM	Tube furnace set to 1000
10/27/2010	11:58:35 AM	Helium valve closed
10/27/2010	11:58:35 AM	BCl3 valve closed
10/27/2010	11:58:35 AM	PH3 valve closed
10/27/2010	11:58:35 AM	SiCl4 pre valve closed
10/27/2010	11:58:35 AM	SiCl4 post valve closed
10/27/2010	11:58:35 AM	Main Vac valve closed
10/27/2010	11:58:35 AM	Bypass valve closed
10/27/2010	11:58:35 AM	H2 valve opened
10/27/2010	11:58:35 AM	Bubbler valve opened
10/27/2010	11:58:35 AM	Helium MFC set to  0.000000
10/27/2010	11:58:35 AM	H2 MFC set to  500.000000
10/27/2010	11:58:35 AM	BCl3 MFC set to  0.000000
10/27/2010	11:58:35 AM	PHl3 MFC set to  0.000000
10/27/2010	11:58:35 AM	SiCl4 MFC set to  0.000000
10/27/2010	11:58:35 AM	Bypass solenoid MFC set to  0.000000
10/27/2010	11:58:35 AM	Tube furnace set to 1000
10/27/2010	12:02:07 PM	Helium valve closed
10/27/2010	12:02:07 PM	BCl3 valve closed
10/27/2010	12:02:07 PM	PH3 valve closed
10/27/2010	12:02:07 PM	SiCl4 pre valve closed
10/27/2010	12:02:07 PM	SiCl4 post valve closed
10/27/2010	12:02:07 PM	Main Vac valve closed
10/27/2010	12:02:07 PM	Bypass valve closed
10/27/2010	12:02:07 PM	H2 valve opened
10/27/2010	12:02:07 PM	Bubbler valve opened
10/27/2010	12:02:07 PM	Helium MFC set to  0.000000
10/27/2010	12:02:07 PM	H2 MFC set to  500.000000
10/27/2010	12:02:07 PM	BCl3 MFC set to  0.000000
10/27/2010	12:02:07 PM	PHl3 MFC set to  0.000000
10/27/2010	12:02:07 PM	SiCl4 MFC set to  0.000000
10/27/2010	12:02:07 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	12:02:07 PM	Tube furnace set to 1000
10/27/2010	12:07:07 PM	H2 valve closed
10/27/2010	12:07:07 PM	BCl3 valve closed
10/27/2010	12:07:07 PM	PH3 valve closed
10/27/2010	12:07:07 PM	SiCl4 pre valve closed
10/27/2010	12:07:07 PM	SiCl4 post valve closed
10/27/2010	12:07:07 PM	Main Vac valve closed
10/27/2010	12:07:07 PM	Bypass valve closed
10/27/2010	12:07:07 PM	Helium valve opened
10/27/2010	12:07:07 PM	Bubbler valve opened
10/27/2010	12:07:07 PM	Helium MFC set to  500.000000
10/27/2010	12:07:07 PM	H2 MFC set to  0.000000
10/27/2010	12:07:07 PM	BCl3 MFC set to  0.000000
10/27/2010	12:07:07 PM	PHl3 MFC set to  0.000000
10/27/2010	12:07:07 PM	SiCl4 MFC set to  0.000000
10/27/2010	12:07:07 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	12:07:07 PM	Tube furnace set to 0
10/27/2010	12:27:07 PM	Helium valve closed
10/27/2010	12:27:07 PM	H2 valve closed
10/27/2010	12:27:07 PM	BCl3 valve closed
10/27/2010	12:27:07 PM	PH3 valve closed
10/27/2010	12:27:07 PM	SiCl4 pre valve closed
10/27/2010	12:27:07 PM	SiCl4 post valve closed
10/27/2010	12:27:07 PM	Main Vac valve closed
10/27/2010	12:27:07 PM	Bypass valve closed
10/27/2010	12:27:07 PM	Bubbler valve closed
10/27/2010	12:27:07 PM	Helium MFC set to  0.000000
10/27/2010	12:27:07 PM	H2 MFC set to  0.000000
10/27/2010	12:27:07 PM	BCl3 MFC set to  0.000000
10/27/2010	12:27:07 PM	PHl3 MFC set to  0.000000
10/27/2010	12:27:07 PM	SiCl4 MFC set to  0.000000
10/27/2010	12:27:07 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	12:27:08 PM	Tube furnace set to 0
10/27/2010	12:27:08 PM	Run finished at 12:27 PM
10/27/2010	2:31:52 PM	Bypass valve opened
10/27/2010	2:33:40 PM	Main Vac valve opened
10/27/2010	3:58:54 PM	Bypass valve closed
10/27/2010	3:58:54 PM	Main Vac valve closed
10/27/2010	3:59:08 PM	H2 valve opened
10/27/2010	3:59:27 PM	H2 valve closed
10/27/2010	3:59:32 PM	Recipe started at 3:59 PM
10/27/2010	3:59:32 PM	Helium valve closed
10/27/2010	3:59:32 PM	BCl3 valve closed
10/27/2010	3:59:32 PM	PH3 valve closed
10/27/2010	3:59:32 PM	SiCl4 pre valve closed
10/27/2010	3:59:32 PM	SiCl4 post valve closed
10/27/2010	3:59:32 PM	Main Vac valve closed
10/27/2010	3:59:32 PM	Bypass valve closed
10/27/2010	3:59:32 PM	Bubbler valve closed
10/27/2010	3:59:32 PM	H2 valve opened
10/27/2010	3:59:32 PM	Helium MFC set to  0.000000
10/27/2010	3:59:32 PM	H2 MFC set to  500.000000
10/27/2010	3:59:32 PM	BCl3 MFC set to  0.000000
10/27/2010	3:59:32 PM	PHl3 MFC set to  0.000000
10/27/2010	3:59:32 PM	SiCl4 MFC set to  0.000000
10/27/2010	3:59:32 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	3:59:32 PM	Tube furnace set to 100
10/27/2010	4:00:54 PM	Helium valve closed
10/27/2010	4:00:54 PM	BCl3 valve closed
10/27/2010	4:00:54 PM	PH3 valve closed
10/27/2010	4:00:54 PM	SiCl4 pre valve closed
10/27/2010	4:00:54 PM	SiCl4 post valve closed
10/27/2010	4:00:54 PM	Main Vac valve closed
10/27/2010	4:00:54 PM	Bypass valve closed
10/27/2010	4:00:54 PM	H2 valve opened
10/27/2010	4:00:54 PM	Bubbler valve opened
10/27/2010	4:00:54 PM	Helium MFC set to  0.000000
10/27/2010	4:00:54 PM	H2 MFC set to  500.000000
10/27/2010	4:00:54 PM	BCl3 MFC set to  0.000000
10/27/2010	4:00:54 PM	PHl3 MFC set to  0.000000
10/27/2010	4:00:54 PM	SiCl4 MFC set to  0.000000
10/27/2010	4:00:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	4:00:54 PM	Tube furnace set to 1000
10/27/2010	4:20:54 PM	Helium valve closed
10/27/2010	4:20:54 PM	PH3 valve closed
10/27/2010	4:20:54 PM	Main Vac valve closed
10/27/2010	4:20:54 PM	Bypass valve closed
10/27/2010	4:20:54 PM	H2 valve opened
10/27/2010	4:20:54 PM	BCl3 valve opened
10/27/2010	4:20:54 PM	SiCl4 pre valve opened
10/27/2010	4:20:54 PM	SiCl4 post valve opened
10/27/2010	4:20:54 PM	Bubbler valve opened
10/27/2010	4:20:54 PM	Helium MFC set to  0.000000
10/27/2010	4:20:54 PM	H2 MFC set to  500.000000
10/27/2010	4:20:54 PM	BCl3 MFC set to  10.000000
10/27/2010	4:20:54 PM	PHl3 MFC set to  0.000000
10/27/2010	4:20:54 PM	SiCl4 MFC set to  50.000000
10/27/2010	4:20:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	4:20:54 PM	Tube furnace set to 1000
10/27/2010	4:32:54 PM	H2 valve closed
10/27/2010	4:32:54 PM	BCl3 valve closed
10/27/2010	4:32:54 PM	PH3 valve closed
10/27/2010	4:32:54 PM	SiCl4 pre valve closed
10/27/2010	4:32:54 PM	SiCl4 post valve closed
10/27/2010	4:32:54 PM	Main Vac valve closed
10/27/2010	4:32:54 PM	Bypass valve closed
10/27/2010	4:32:54 PM	Helium valve opened
10/27/2010	4:32:54 PM	Bubbler valve opened
10/27/2010	4:32:54 PM	Helium MFC set to  500.000000
10/27/2010	4:32:54 PM	H2 MFC set to  0.000000
10/27/2010	4:32:54 PM	BCl3 MFC set to  0.000000
10/27/2010	4:32:54 PM	PHl3 MFC set to  0.000000
10/27/2010	4:32:54 PM	SiCl4 MFC set to  0.000000
10/27/2010	4:32:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	4:32:55 PM	Tube furnace set to 0
10/27/2010	4:52:54 PM	Helium valve closed
10/27/2010	4:52:54 PM	H2 valve closed
10/27/2010	4:52:54 PM	BCl3 valve closed
10/27/2010	4:52:54 PM	PH3 valve closed
10/27/2010	4:52:54 PM	SiCl4 pre valve closed
10/27/2010	4:52:54 PM	SiCl4 post valve closed
10/27/2010	4:52:54 PM	Main Vac valve closed
10/27/2010	4:52:54 PM	Bypass valve closed
10/27/2010	4:52:54 PM	Bubbler valve closed
10/27/2010	4:52:54 PM	Helium MFC set to  0.000000
10/27/2010	4:52:54 PM	H2 MFC set to  0.000000
10/27/2010	4:52:54 PM	BCl3 MFC set to  0.000000
10/27/2010	4:52:54 PM	PHl3 MFC set to  0.000000
10/27/2010	4:52:54 PM	SiCl4 MFC set to  0.000000
10/27/2010	4:52:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	4:52:55 PM	Tube furnace set to 0
10/27/2010	4:52:55 PM	Run finished at 4:52 PM
10/27/2010	6:57:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	6:57:09 PM	Recipe started at 6:57 PM
10/27/2010	6:57:09 PM	Helium valve closed
10/27/2010	6:57:09 PM	H2 valve closed
10/27/2010	6:57:09 PM	BCl3 valve closed
10/27/2010	6:57:09 PM	PH3 valve closed
10/27/2010	6:57:09 PM	SiCl4 pre valve closed
10/27/2010	6:57:09 PM	SiCl4 post valve closed
10/27/2010	6:57:09 PM	Main Vac valve closed
10/27/2010	6:57:09 PM	Bubbler valve closed
10/27/2010	6:57:09 PM	Bypass valve opened
10/27/2010	6:57:09 PM	Helium MFC set to  0.000000
10/27/2010	6:57:09 PM	H2 MFC set to  0.000000
10/27/2010	6:57:09 PM	BCl3 MFC set to  0.000000
10/27/2010	6:57:09 PM	PHl3 MFC set to  0.000000
10/27/2010	6:57:09 PM	SiCl4 MFC set to  0.000000
10/27/2010	6:57:09 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	6:57:09 PM	Tube furnace set to 0
10/27/2010	6:58:01 PM	Helium valve closed
10/27/2010	6:58:01 PM	H2 valve closed
10/27/2010	6:58:01 PM	BCl3 valve closed
10/27/2010	6:58:01 PM	PH3 valve closed
10/27/2010	6:58:01 PM	SiCl4 pre valve closed
10/27/2010	6:58:01 PM	SiCl4 post valve closed
10/27/2010	6:58:01 PM	Bubbler valve closed
10/27/2010	6:58:01 PM	Main Vac valve opened
10/27/2010	6:58:01 PM	Bypass valve opened
10/27/2010	6:58:01 PM	Helium MFC set to  0.000000
10/27/2010	6:58:01 PM	H2 MFC set to  0.000000
10/27/2010	6:58:01 PM	BCl3 MFC set to  0.000000
10/27/2010	6:58:01 PM	PHl3 MFC set to  0.000000
10/27/2010	6:58:01 PM	SiCl4 MFC set to  0.000000
10/27/2010	6:58:01 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	6:58:01 PM	Tube furnace set to 0
10/27/2010	6:58:02 PM	Run finished at 6:58 PM
10/27/2010	6:58:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	7:09:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2010	7:09:47 PM	Recipe started at 7:09 PM
10/27/2010	7:09:47 PM	H2 valve closed
10/27/2010	7:09:47 PM	BCl3 valve closed
10/27/2010	7:09:47 PM	PH3 valve closed
10/27/2010	7:09:47 PM	SiCl4 pre valve closed
10/27/2010	7:09:47 PM	SiCl4 post valve closed
10/27/2010	7:09:47 PM	Main Vac valve closed
10/27/2010	7:09:47 PM	Bypass valve closed
10/27/2010	7:09:47 PM	Bubbler valve closed
10/27/2010	7:09:47 PM	Helium valve opened
10/27/2010	7:09:47 PM	Helium MFC set to  500.000000
10/27/2010	7:09:47 PM	H2 MFC set to  0.000000
10/27/2010	7:09:47 PM	BCl3 MFC set to  0.000000
10/27/2010	7:09:47 PM	PHl3 MFC set to  0.000000
10/27/2010	7:09:47 PM	SiCl4 MFC set to  0.000000
10/27/2010	7:09:47 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	7:09:47 PM	Tube furnace set to 0
10/27/2010	7:11:05 PM	Helium valve closed
10/27/2010	7:11:05 PM	H2 valve closed
10/27/2010	7:11:05 PM	BCl3 valve closed
10/27/2010	7:11:05 PM	PH3 valve closed
10/27/2010	7:11:05 PM	SiCl4 pre valve closed
10/27/2010	7:11:05 PM	SiCl4 post valve closed
10/27/2010	7:11:05 PM	Main Vac valve closed
10/27/2010	7:11:05 PM	Bypass valve closed
10/27/2010	7:11:05 PM	Bubbler valve closed
10/27/2010	7:11:05 PM	Helium MFC set to  0.000000
10/27/2010	7:11:05 PM	H2 MFC set to  0.000000
10/27/2010	7:11:05 PM	BCl3 MFC set to  0.000000
10/27/2010	7:11:05 PM	PHl3 MFC set to  0.000000
10/27/2010	7:11:05 PM	SiCl4 MFC set to  0.000000
10/27/2010	7:11:05 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	7:11:05 PM	Tube furnace set to 0
10/27/2010	7:11:06 PM	Run finished at 7:11 PM
10/27/2010	7:11:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2010	7:16:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	7:16:00 PM	Recipe started at 7:16 PM
10/27/2010	7:16:00 PM	Helium valve closed
10/27/2010	7:16:00 PM	H2 valve closed
10/27/2010	7:16:00 PM	BCl3 valve closed
10/27/2010	7:16:00 PM	PH3 valve closed
10/27/2010	7:16:00 PM	SiCl4 pre valve closed
10/27/2010	7:16:00 PM	SiCl4 post valve closed
10/27/2010	7:16:00 PM	Main Vac valve closed
10/27/2010	7:16:00 PM	Bubbler valve closed
10/27/2010	7:16:00 PM	Bypass valve opened
10/27/2010	7:16:00 PM	Helium MFC set to  0.000000
10/27/2010	7:16:00 PM	H2 MFC set to  0.000000
10/27/2010	7:16:00 PM	BCl3 MFC set to  0.000000
10/27/2010	7:16:00 PM	PHl3 MFC set to  0.000000
10/27/2010	7:16:00 PM	SiCl4 MFC set to  0.000000
10/27/2010	7:16:00 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	7:16:00 PM	Tube furnace set to 0
10/27/2010	7:16:51 PM	Helium valve closed
10/27/2010	7:16:51 PM	H2 valve closed
10/27/2010	7:16:51 PM	BCl3 valve closed
10/27/2010	7:16:51 PM	PH3 valve closed
10/27/2010	7:16:51 PM	SiCl4 pre valve closed
10/27/2010	7:16:51 PM	SiCl4 post valve closed
10/27/2010	7:16:51 PM	Bubbler valve closed
10/27/2010	7:16:51 PM	Main Vac valve opened
10/27/2010	7:16:51 PM	Bypass valve opened
10/27/2010	7:16:51 PM	Helium MFC set to  0.000000
10/27/2010	7:16:51 PM	H2 MFC set to  0.000000
10/27/2010	7:16:51 PM	BCl3 MFC set to  0.000000
10/27/2010	7:16:51 PM	PHl3 MFC set to  0.000000
10/27/2010	7:16:51 PM	SiCl4 MFC set to  0.000000
10/27/2010	7:16:51 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	7:16:51 PM	Tube furnace set to 0
10/27/2010	7:16:51 PM	Run finished at 7:16 PM
10/27/2010	7:16:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	8:22:28 PM	Recipe started at 8:22 PM
10/27/2010	8:22:28 PM	Helium valve closed
10/27/2010	8:22:28 PM	BCl3 valve closed
10/27/2010	8:22:28 PM	PH3 valve closed
10/27/2010	8:22:28 PM	SiCl4 pre valve closed
10/27/2010	8:22:28 PM	SiCl4 post valve closed
10/27/2010	8:22:28 PM	Main Vac valve closed
10/27/2010	8:22:28 PM	Bypass valve closed
10/27/2010	8:22:28 PM	Bubbler valve closed
10/27/2010	8:22:28 PM	H2 valve opened
10/27/2010	8:22:28 PM	Helium MFC set to  0.000000
10/27/2010	8:22:28 PM	H2 MFC set to  500.000000
10/27/2010	8:22:28 PM	BCl3 MFC set to  0.000000
10/27/2010	8:22:28 PM	PHl3 MFC set to  0.000000
10/27/2010	8:22:28 PM	SiCl4 MFC set to  0.000000
10/27/2010	8:22:28 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	8:22:29 PM	Tube furnace set to 100
10/27/2010	8:23:50 PM	Helium valve closed
10/27/2010	8:23:50 PM	BCl3 valve closed
10/27/2010	8:23:50 PM	PH3 valve closed
10/27/2010	8:23:50 PM	SiCl4 pre valve closed
10/27/2010	8:23:50 PM	SiCl4 post valve closed
10/27/2010	8:23:50 PM	Main Vac valve closed
10/27/2010	8:23:50 PM	Bypass valve closed
10/27/2010	8:23:50 PM	H2 valve opened
10/27/2010	8:23:50 PM	Bubbler valve opened
10/27/2010	8:23:50 PM	Helium MFC set to  0.000000
10/27/2010	8:23:50 PM	H2 MFC set to  500.000000
10/27/2010	8:23:50 PM	BCl3 MFC set to  0.000000
10/27/2010	8:23:50 PM	PHl3 MFC set to  0.000000
10/27/2010	8:23:50 PM	SiCl4 MFC set to  0.000000
10/27/2010	8:23:50 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	8:23:50 PM	Tube furnace set to 1000
10/27/2010	8:43:50 PM	Helium valve closed
10/27/2010	8:43:50 PM	PH3 valve closed
10/27/2010	8:43:50 PM	Main Vac valve closed
10/27/2010	8:43:50 PM	Bypass valve closed
10/27/2010	8:43:50 PM	H2 valve opened
10/27/2010	8:43:50 PM	BCl3 valve opened
10/27/2010	8:43:50 PM	SiCl4 pre valve opened
10/27/2010	8:43:50 PM	SiCl4 post valve opened
10/27/2010	8:43:50 PM	Bubbler valve opened
10/27/2010	8:43:50 PM	Helium MFC set to  0.000000
10/27/2010	8:43:50 PM	H2 MFC set to  500.000000
10/27/2010	8:43:50 PM	BCl3 MFC set to  10.000000
10/27/2010	8:43:50 PM	PHl3 MFC set to  0.000000
10/27/2010	8:43:50 PM	SiCl4 MFC set to  50.000000
10/27/2010	8:43:50 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	8:43:51 PM	Tube furnace set to 1000
10/27/2010	8:55:50 PM	H2 valve closed
10/27/2010	8:55:50 PM	BCl3 valve closed
10/27/2010	8:55:51 PM	PH3 valve closed
10/27/2010	8:55:51 PM	SiCl4 pre valve closed
10/27/2010	8:55:51 PM	SiCl4 post valve closed
10/27/2010	8:55:51 PM	Main Vac valve closed
10/27/2010	8:55:51 PM	Bypass valve closed
10/27/2010	8:55:51 PM	Helium valve opened
10/27/2010	8:55:51 PM	Bubbler valve opened
10/27/2010	8:55:51 PM	Helium MFC set to  500.000000
10/27/2010	8:55:51 PM	H2 MFC set to  0.000000
10/27/2010	8:55:51 PM	BCl3 MFC set to  0.000000
10/27/2010	8:55:51 PM	PHl3 MFC set to  0.000000
10/27/2010	8:55:51 PM	SiCl4 MFC set to  0.000000
10/27/2010	8:55:51 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	8:55:51 PM	Tube furnace set to 0
10/27/2010	9:15:51 PM	Helium valve closed
10/27/2010	9:15:51 PM	H2 valve closed
10/27/2010	9:15:51 PM	BCl3 valve closed
10/27/2010	9:15:51 PM	PH3 valve closed
10/27/2010	9:15:51 PM	SiCl4 pre valve closed
10/27/2010	9:15:51 PM	SiCl4 post valve closed
10/27/2010	9:15:51 PM	Main Vac valve closed
10/27/2010	9:15:51 PM	Bypass valve closed
10/27/2010	9:15:51 PM	Bubbler valve closed
10/27/2010	9:15:51 PM	Helium MFC set to  0.000000
10/27/2010	9:15:51 PM	H2 MFC set to  0.000000
10/27/2010	9:15:51 PM	BCl3 MFC set to  0.000000
10/27/2010	9:15:51 PM	PHl3 MFC set to  0.000000
10/27/2010	9:15:51 PM	SiCl4 MFC set to  0.000000
10/27/2010	9:15:51 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	9:15:51 PM	Tube furnace set to 0
10/27/2010	9:15:51 PM	Run finished at 9:15 PM
10/27/2010	10:28:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2010	10:28:44 PM	Recipe started at 10:28 PM
10/27/2010	10:28:44 PM	Helium valve closed
10/27/2010	10:28:44 PM	H2 valve closed
10/27/2010	10:28:44 PM	BCl3 valve closed
10/27/2010	10:28:44 PM	PH3 valve closed
10/27/2010	10:28:44 PM	SiCl4 pre valve closed
10/27/2010	10:28:44 PM	SiCl4 post valve closed
10/27/2010	10:28:44 PM	Main Vac valve closed
10/27/2010	10:28:44 PM	Bubbler valve closed
10/27/2010	10:28:44 PM	Bypass valve opened
10/27/2010	10:28:44 PM	Helium MFC set to  0.000000
10/27/2010	10:28:44 PM	H2 MFC set to  0.000000
10/27/2010	10:28:44 PM	BCl3 MFC set to  0.000000
10/27/2010	10:28:44 PM	PHl3 MFC set to  0.000000
10/27/2010	10:28:44 PM	SiCl4 MFC set to  0.000000
10/27/2010	10:28:44 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:28:44 PM	Tube furnace set to 0
10/27/2010	10:29:37 PM	Helium valve closed
10/27/2010	10:29:37 PM	H2 valve closed
10/27/2010	10:29:37 PM	BCl3 valve closed
10/27/2010	10:29:37 PM	PH3 valve closed
10/27/2010	10:29:37 PM	SiCl4 pre valve closed
10/27/2010	10:29:37 PM	SiCl4 post valve closed
10/27/2010	10:29:37 PM	Bubbler valve closed
10/27/2010	10:29:37 PM	Main Vac valve opened
10/27/2010	10:29:37 PM	Bypass valve opened
10/27/2010	10:29:37 PM	Helium MFC set to  0.000000
10/27/2010	10:29:37 PM	H2 MFC set to  0.000000
10/27/2010	10:29:37 PM	BCl3 MFC set to  0.000000
10/27/2010	10:29:37 PM	PHl3 MFC set to  0.000000
10/27/2010	10:29:37 PM	SiCl4 MFC set to  0.000000
10/27/2010	10:29:37 PM	Bypass solenoid MFC set to  0.000000
10/27/2010	10:29:38 PM	Tube furnace set to 0
10/27/2010	10:29:38 PM	Run finished at 10:29 PM
10/27/2010	10:29:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
